Vögtlin Smart Series Thermal Mass Flow Controllers

Vögtlin Smart Series Thermal Mass Flow Controllers

High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases
Brand: Vogtlin Instruments

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Description

Reliable technology and industry standard interfaces make the red-y smart series thermal mass flow meters (MFM) and mass flow controllers (MFC) particularly suitable for measurement and control in gas delivery systems and plant engineering applications.

MEASURING RANGES
Air/Full scale freely selectable Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Body size ½” from 0 … 60 ln/min to 0 … 450 ln/min (from 0 … 65 SLPM to 0 … 480 SLPM)
INSTRUMENT VERSIONS
“Standard”
The economic solution
Accuracy: ± 1.0% of full scale*
Turndown ratio: 1 : 50
“Hi-Performance”
With highest accuracy and turndown ratio
(available for GSM < 200 ln/min (200 SLPM) /
GSC < 150 ln/min (150 SLPM) (air))
Accuracy: ± 0.3% of full scale + ± 0.5% of reading*
Turndown ratio: 1 : 100
*An additional error of ±0.25% may apply for analogue signals
PERFORMANCE DATA
Media (real gas calibration) Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request)
*O2 & N2 are calibrated with air
Response time Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms*
*depending on device configuration & according to SEMI standard E17-1011,
5-100% of range under optimized conditions
Repeatability ± 0.2% of full scale (according to SEMI standard E56-0309)
Longterm stability < 1% of measured value / year
Power supply 24 Vdc (18 – 30 Vdc), 15 Vdc on request
Current consumption Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA
(GSC with valve type 8 max. 410mA)
Operation pressure 0.2 – 11 bar a (3 – 160 psia) / GSC with valve type 4.5 and 8 max. 8 bar a (120 psia)
Temperature (environment/gas) 0 – 50°C (32 – 122°F)
Body Materials Anodized aluminum, optional stainless steel electropolished
Seals FKM, EPDM, optional FFKM
Pressure sensitivity < 0.2% / bar of reading (typical N2)
Temperature sensitivity 0.025% FS measuring range type per 1°C (<0.012% per 1°F)
Warm-up time < 1 sec. for full accuracy
INTEGRATION & INSTALLATION
Output signals analog 0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V
Output signals digital RS-485; Modbus RTU (Slave); LabView-VIs available
Option: Profibus DP-V0, DP-V1 / Profinet RT / EtherCAT
Process connection G¼” (BSPP* female) up to 60 ln/min (64 SLPM)
G½” (BSPP* female) up to 450 ln/min (480 SLPM)
*British Standard Pipe Parallel
Inlet section None required
Electrical connection Sub D plug, 9 pole
Mounting orientation Any position (consult manufacturer above 5 bar or vertical mounting)